Under NEDO’s “Strategic Energy Conservation Technology Innovation Program,” Sunrick, in collaboration with Tohoku University and Yamagata University, has been developing vacuum evaporation cells for the formation of organic and metal thin films for organic EL. ) and its single-crystal wire fabrication process, which can be processed at room temperature.
The new alloy has a melting point of over 2,000°C, and has properties such as low wear and tear even after long-term heating in a vacuum, high electrical resistivity, and small temperature dependence of electrical resistivity. In addition, we have established a crystal growth method to produce single-crystal wires in a single process, which enables us to create any heater wire shape. By using this new alloy heater wire, the degree of freedom in the shape of the deposition cell has been improved, and longer life and higher efficiency have been realized. Demonstrations of this deposition cell have confirmed a current reduction of 20% to 34%, a power saving effect of approximately 12%, and a stabilization of temperature controllability of more than twice as much as that of conventional cells.
This achievement can be applied to a wide range of high-temperature heating equipment, including OLED production processes, and is expected to expand its use toward the realization of carbon neutrality as well as energy conservation.